Hi Jürgen,

I just checked, and generate_XDS.INP works for me as it should. 
My Mac is also running 10.9.5 since Sep 20, and it updated the "Command Line 
Tools (OS X 10.9)" to Version 6.0 on the same date. 
generate_XDS.INP certainly depends on the "Command Line Tools" so you may want 
to make sure that these are updated.

HTH,
Kay

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