Atomic Layer Deposition for Flexible Electronics: from Functional Thin Films
to Thin Film Devices is coming at 07/18/2019 - 4:00pm

KEC 1007
Thu, 07/18/2019 - 4:00pm

Jin-Seong Park
Professor, Division of Materials Science and Engineering, Hanyang University

Abstract:
Atomic Layer Deposition (ALD) has remarkably developed in semiconductor and
nano-structure applications since early 1990. The unique properties,
including controlling atomic-level-thickness, manipulating
atomic-level-composition control, and depositing impurity-free films
uniformly, may accelerate ALD related industries and applications in
functional thin film markets. One of big commercial industries, display
market, just starts to look at the potential to adopt various functional
inorganic/organic/hybrid films based on ALD/molecular layer deposition (MLD)
techniques in emerging applications, such as transparent, flexible, and
wearable electronics.

Recently, amorphous oxide semiconductors have been widely studied for the
potential use in flat panel displays such as active matrix liquid crystal
display (LCD) and Organic light emitting diodes (OLEDs). Since reporting
amorphous InGaZnO semiconductor thin film transistor (TFT) in 2003 & 2004,
many multi-component oxide semiconductors have been intensively investigated
and developed by reactive sputtering method. Very recently, the sputtered
InGaZnO TFTs are already adopted in mass-production to fabricate AMOLED TVs.
However, there remain several problems such as high mobility & stability
issues. Also, virtual and argument reality (VR, AR) applications are rapidly
emerging in display markets but the main issues are high resolution and low
voltage driving technologies.

In this talk, I will take the brief emerging display market trend and
forecast to understand what they are looking for. In fact, the AMOLED (active
matrix organic light emitting diode) Television markets are just starting at
early 2013. There are a few possibilities and needs to be developing for
AMOLED, flexible and transparent Display markets. Then, firstly, functional
oxide and organic thin films, deposited by ALD/MLD have been demonstrated in
emerging applications (flexible, transparent, and wearable things). Gas
diffusion barrier property such as water and oxygen water vapor are important
for passivation and encapsulation applications. Secondly, the functional
oxide conductor/semiconductor films deposited by ALD will be discussed for
applying transparent conductor and thin film transistor as an active layer
even on flexible substrates, including InOx, SnOx, ZnSnO, InZnOx, InZnSnOx,
and InGaZnOx. Also, I will update recent results of p-type ALD SnO
semiconductors including physical, chemical, and electrical properties, that
is a unique ALD film under a specific chemical precursor.  As a new
deposition process in Display industries, ALD will be intensively discussed
for applying the emerging electronic devices.

Bio:

Read more:
http://eecs.oregonstate.edu/colloquium/atomic-layer-deposition-flexible-... 
[1]


[1] 
http://eecs.oregonstate.edu/colloquium/atomic-layer-deposition-flexible-electronics-functional-thin-films-thin-film-devices
_______________________________________________
Colloquium mailing list
[email protected]
https://secure.engr.oregonstate.edu/mailman/listinfo/colloquium
  • [EECS Colloquium] ... School of Electrical Engineering & Computer Science
    • [EECS Colloqu... School of Electrical Engineering & Computer Science

Reply via email to