Chris Dupres <[email protected]> wrote: > I've been asked a question about what I beleieve to be a safety > standard for Semiconductor Manufacturing Plant. This is not a > business I am directly involved in, but I'd like to identify it. > The standard is SEMI-S2-93 >Can anybody let me know what this is, and what it covers?
Don't know anything about it, but a quick "Altavista" search reveals that it is available from: http://www.semi.org/Focused/ehs/ehstandards.html (for a small fee of $30 !) and an abstract from there is as follows: SEMI S2-93, Safety Guidelines for Semiconductor Manufacturing Equipment. These guidelines are intended as a minimum set of performance based environmental, health, and safety considerations for equipment used in semiconductor manufacturing. These guidelines apply to equipment used in the manufacturing, metrology, assembly, and testing of semiconductor products. -- ------------------------------------------------------------- Alan Hudson EMC/EW Specialist Marconi Simulation (Scotland, UK) mailto:[email protected] ----------------------------------------------------------------
