Jeff, SEMI E33-94 is titled "Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility" and applies to "facilities and equipment constructed for the purpose of manufacturing semiconductor devices including all facilities alarm, safety, communications and control systems, processing equipment, metrology equipment, automation equipment, and information technology equipment."
While some of EMC requirements and references in SEMI E33-94 are outdated (and while others are inconsistent with the levels in EMC standards), SEMI E33-94 provides a sensible Section 8 on Alternate Testing, "Testing completed under a different, but substantially similar standard may be substituted for the basic standard specified herein if the performance criteria in the test report, and must be agreed to by the concerned parties. Examples include substition of ANSI C63.4-1991 testing for CISPR 22. Similarly, equipment which satisfy the European Electromagnetic Compatibility Directive and bears the CE mark meets this specification." Author's personal comments: SEMI E33-94 was initially developed with the strong backing by Intel Corporation. Even after its initial release, SEMI E33-94 never really received the embrace of the industry. With the exception of Intel Corporation, I don't even believe that other device manufacturers are requiring SEMI E33-94 as part of their purchasing specifications. With EMC Directive now in full and mandatory effect, at least for the EU, there is now a growing number of SEMI members who believe that SEMI E33-94 should be retired at its upcoming 5-year mandatory review. To obtain pricing and ordering of the SEMI E33-94, you can contact SEMI's Publication Department at [email protected] Regards, Tin In a message dated 98-03-13 16:31:53 EST, [email protected] writes: << Is anyone familiar with the E33-94 specification??? I believe it is related to Semiconductor equipment facilities EMC characteristics. Please respond if you have or are familiar with these requirements. Regards, Jeff Collins EMC/Product Safety Engineer Perkin Elmer Applied Biosystems [email protected] >>
