Richard,

There is an Online Documents section of the SEMI Organization at
http://www.semi.org/.  You will need to pay a small fee and you can receive
the document in PDF format.

==================================
Doug Powell, Compliance Engineer
Advanced Energy Industries, Inc.
Fort Collins, Colorado USA

[email protected]
www.advanced-energy.com
==================================


-----Original Message-----
From: Richard Cass [mailto:[email protected]]
Sent: Tuesday, March 23, 1999 8:09 AM
To: 'EMC-PSTC (E-mail)'
Subject: SEMI E10


I know its slightly off subject but could someone the easiest way to order
(or obtain for free) a copy of: 
SEMI Standard E10-96, "Guideline for Definition and Measurement of Equipment
Reliability, Availability, and Maintainability (RAM)"

Richard Cass
Iris Graphics
Bedford, MA 01730

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