Daniel, This is a Facilities standard orginiated by the SEMI organization and deals with Voltage Sag Ride-through capabilty. You can buy this and other standards paper or PDF for $50.00 each at http://www.semi.org/web/wstandards.nsf/
Here is the abstract: SEMI F47-0200 Specification for Semiconductor Processing Equipment Voltage Sag Immunity Semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags. This document defines the voltage sag ride-through capability required for semiconductor processing, metrology, and automated test equipment. The requirements in this international standard were developed to satisfy semiconductor industry needs. While more stringent than existing generic standards, this industry-specific specification is not in conflict with known generic equipment regulations from other regions or generic equipment standards from other organizations. It is the intent of this standard to provide specifications for semiconductor processing equipment that will lead to improved selection criteria for sub-components and improvements in equipment systems design. While it is recognized that in certain extreme cases or for specific functions battery storage devices may be appropriate, it is not the intent of this standard to increase the size or use of battery storage devices provided with equipment. Focus on improvements in equipment component and system design should lead to a reduction or elimination in the use of battery storage devices to achieve equipment reliability during voltage sag events. This document specifies the minimum voltage sag ride-through capability design requirements for equipment used in the semiconductor industry. The expected equipment performance capability is shown graphically on a chart representing voltage sag duration and percent deviation of equipment nominal voltage. Standard evaluation test method references are also included. The primary focus for this specification is semiconductor processing equipment including but not limited to the following tool types: etch equipment (Dry & Wet), film deposition equipment (CVD & PVD), thermal equipment, surface prep and clean, photolithography equipment (Stepper & Tracks), Chemical Mechanical Polishing equipment, Ion Implant equipment, Metrology equipment, and automated test equipment. This specification applies to semiconductor processing equipment to include the equipment mainframe and all subsystems whose electrical power is directly affected by the operation of the equipment's EMO system. Referenced SEMI Standards: SEMI E10 -- Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM), SEMI E51 -- Guide for Typical Facilities Services and Termination Matrix, SEMI F42 -- Test Method for Semiconductor Processing Equipment Voltage Sag Immunity, and SEMI S2 -- Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment -doug ================================= Douglas E. Powell Regulatory Compliance Engineer Advanced Energy Industries, Inc. 1625 Sharp Point Dr. Ft. Collins, Co 80525 mailto:[email protected] http:\\www.advanced-energy.com\ ================================= -----Original Message----- From: Biggs, Daniel (IndSys, GEFanuc, NA) [mailto:[email protected]] Sent: Thursday, July 27, 2000 10:55 AM To: 'Emc-Pstc (E-mail)' Subject: SEMI F47 Has anyone on this list heard of standard SEMI F47? Is there a similar european standard to this? What exactly does the standard deal with? DB > g GE Industrial Systems > _______________________________________________________ > > Daniel Biggs > Test Engineer > Hardware Design Services > > GE Fanuc Automation > PO Box 8106 > Charlottesville, VA 22906 > PH: (804) 978-6946 > Fax: (804) 978-5588 > > ------------------------------------------- This message is from the IEEE EMC Society Product Safety Technical Committee emc-pstc discussion list. To cancel your subscription, send mail to: [email protected] with the single line: unsubscribe emc-pstc For help, send mail to the list administrators: Jim Bacher: [email protected] Michael Garretson: [email protected] For policy questions, send mail to: Richard Nute: [email protected] ------------------------------------------- This message is from the IEEE EMC Society Product Safety Technical Committee emc-pstc discussion list. To cancel your subscription, send mail to: [email protected] with the single line: unsubscribe emc-pstc For help, send mail to the list administrators: Jim Bacher: [email protected] Michael Garretson: [email protected] For policy questions, send mail to: Richard Nute: [email protected]
