Can anyone recommend a design standard for an oven intended to "bake" silicon wafers, (or closely related product standards).
My primary interest is electrical design requirements for resistive heating elements. Similar products may be Kilns for wood drying or ceramics, Ovens for food or conditioning materials / electrical assemblies NFPA 79 has some advice on the issues, but not enough... Thanks in advance.... Lauren Crane * Product Safety & Compliance Engineer * Ion Beam and Thermal Processing Systems * Axcelis Technologies Inc. * 108 Cherry Hill Dr. * Beverly, MA 01915 * 978.921-9745 [email protected] ------------------------------------------- This message is from the IEEE EMC Society Product Safety Technical Committee emc-pstc discussion list. To cancel your subscription, send mail to: [email protected] with the single line: unsubscribe emc-pstc For help, send mail to the list administrators: Jim Bacher: [email protected] Michael Garretson: [email protected] For policy questions, send mail to: Richard Nute: [email protected]
