I am looking for gas flow sensors that will be used as components in a gas mixing ratio interlock system.
The gas will be one of Ar, O2 or H2 The flow rates will be from 0 to 20 slpm. Gas pressure will be on the order of 30 psi. The components need to be rated for use in a safety system, or otherwise designed so that a total system designed from them is arguably fail safe. Any suggestions on possible manufacturers would be appreciated. Thanks, Lauren Crane * Principal Safety & Compliance Engineer * Ion Beam and Thermal Processing Systems * Axcelis Technologies Inc. * 108 Cherry Hill Dr. * Beverly, MA 01915 * phn 978.787-9745 fax 978.787-3000 * email [email protected] ------------------------------------------- This message is from the IEEE EMC Society Product Safety Technical Committee emc-pstc discussion list. To cancel your subscription, send mail to: [email protected] with the single line: unsubscribe emc-pstc For help, send mail to the list administrators: Jim Bacher: [email protected] Michael Garretson: [email protected] For policy questions, send mail to: Richard Nute: [email protected]
