Hi Lauren

ELF and VLF emissions are a concern for SEM installations since the B field can 
possible distort the electron beam

SEMI EMC calls it out

Best regards

Tom


Sent from my iPhone

On Feb 20, 2013, at 10:45 AM, "Crane, Lauren" <[email protected]> 
wrote:

> Is ‘ELF’ (as in ‘ELF EMI testing’) well established in any region(s) (US, EU, 
> etc…) as a particular frequency set, or is it primarily a subjective term for 
> “low-ish” frequencies?
>  
> If the former, document citations would be very much appreciated.
>  
>  
> Regards,
> Lauren Crane
> KLA-Tencor
>  
> P.S. I realize, of course, that Elf’s are well established in the region of 
> the North Pole with annual frequency and that they are said to be low-ish in 
> stature. ;-)
>  
>  
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