I have update sources via cvsup (with tag=RELENG_4)

This steps finished without problems:
make buildworld
make buildkernel KERNCONF=zzz
make installkernel KERNCONF=zzz
reboot

On step "make installworld" I have error:
=====
16:20#/usr/src/> make installworld

... [skipped] ...

install -c -o root -g wheel -m 644
kld/cdev/module/@/alpha/alpha/busdma_machdep.c
/usr/share/examples/kld/cdev/module/@/alpha/alpha/busdma_machdep.c
install: /usr/share/examples/kld/cdev/module/@/alpha/alpha/busdma_machdep.c:
No such file or directory
*** Error code 71

Stop in /usr/src/share/examples.
*** Error code 1

Stop in /usr/src/share.
*** Error code 1

Stop in /usr/src.
*** Error code 1

Stop in /usr/src.
*** Error code 1

Stop in /usr/src.
*** Error code 1

Stop in /usr/src.
16:33#/usr/src/>
=====

What I do wrong %-?

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