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PESM2007
Conference scope
Continuing
downscaling of semiconductors devices brings new challenges for plasma
etch and strip. New materials (high-k and low-k dielectrics, metal
gates, phase-shift memories etc.) and new architectures (3D devices,
channel-engineered devices etc.) require new etch and strip
approaches. We organize this workshop to bring together people from
research institutions and industry to discuss new challenges in plasma
etch and strip
Conference venue
Leuven
has a long and rich history. Founded in the 9th century, it became an
important trading centre during the middle ages. A very important event
in that time was the foundation of its University in 1425. For almost 6
centuries Leuven has been a centre of education and research; a
tradition which is continued until today.Walking through Leuven you
will discover the many building that testimony its glorious past: its
finely sculpted Gothic town hall, the 13th century beguinage, numerous
historical University buildings scattered all over the town…Another
major event in Leuven’s history is the foundation in 1366 of the
brewery “Van den Hoorn”. This brewery still exists today, changed name
a couple of times, and today is known as “Inbev”, the world largest
brewery. The famous beer “Stella Artois” was born and still is brewed
in Leuven.
