Monday May 21 4:00 - 4:50 PM Kelley 1001
Mohamed A. Abdelmoneum Technology Development Group Intel "Wine-Glass Mode Disk Micro Electro Mechanical Resonator" The need for ultra mobile platforms is increasing rapidly driven by emerging applications as well as by current applications thriving for added features and functionality. Applications ranging from remote patient monitoring, mobile computing to cell phones are in need for monolithic wireless transceivers with new architectures and better performance. To enable such development of monolithic transceivers, bulky of chip filters and oscillators used for frequency selection and generation has to be replaced with on chip version of equal or desirably better performance. Technologies like Film Bulk Acoustic Resonators (FBAR's), Surface Acoustic Wave (SAW) resonators, Piezo Electric Micromechanical Resonators and Vibrating Micro Electro Mechanical Resonators (MEMS) demonstrated great potential to develop single chip transceivers. Vibrating MEMS resonators although have several integration advantages attributed to the compatibility of the fabrication technology with CMOS technology suffered series challenges, namely, need for vacuum packaging to retain their high Q's, high impedance and relatively high DC bias. This talk presents the Wine Glass mode disk vibrating MEMS resonator that exhibited a Q of 100,000 in vacuum and for the first time ever a Q of 10,000 under atmospheric pressure thus eliminating the need for vacuum packaging. A novel nonintrusive anchoring structure is designed to reduce the substrate anchor losses and hence substantially increased the quality factor. To fabricate the device, an innovative all silicon self aligned surface micromachining process is developed to eliminate any degradation performance due to anchor misalignments associated with the tolerances in the patterning process. Different anchoring topologies are presented and the impact on resonator Q is discussed. Thermal stability and aging measurements demonstrate the robustness of the developed device. The demonstrated Wine Glass disk resonator well positioned vibrating RF MEMS resonators as the front runner in the quest to develop a fully monolithic wireless system. Biography: Mohamed A. Abdelmoneum received his B.Sc. from Alexandria University, Alexandria, Egypt in 1994 in Electrical Communications and Electrophysics. He received his M.Sc and Ph.D. degrees from the University of Michigan Ann Arbor in 2000 and 2005 respectively, both in Electrical Engineering and Computer Science. He worked as a field engineer in Schlumberger Wire Line and Testing between January 1996 and May 1996. He then joined the faculty of the University of Tanta, Tanta Egypt as a lecturer assistant in the Department of Mathematics and Basic sciences, where he worked on wavelets and its application to the solution of differential equations. In 1998, he joined the Radiation Laboratory at the University of Michigan Ann Arbor where he worked on computational Electromagnetics and its application to Antenna design, radomes, Frequency Selective Surfaces and Electromagnetic compatibility. In 2001, he joined the Solid State Electronics Lab where he worked on vibrating micromechanical resonators and filters. He focused on developing resonators capable of exhibiting high Q's under different environmental conditions as well as automatic post fabrication trimming of micromechanical resonators and filters. He is currently with Portland Technology Development group at Intel Corporation in Hillsboro Oregon where he is working on engineering analysis systems for process technology development.
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