Are you running a tick-less kernel? That may explain the variations.
Elad
I don't think I can really help you here, but I might as well note that I also had problems with /proc/stat. I have my questions regarding its accuracy: http://mail.nl.linux.org/kernelnewbies/2008-07/msg00196.html I should mention that when I increased the sleeping time my errors got relatively smaller. That is, if with 1 second of sleep I got values ranging from 99 to 500, with 10 seconds of sleep I got values ranging from 1000 to 1500.
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