2009/12/11 Erik Christiansen <[email protected]>: >> the sliding force when released was enough to not even mark the >> substrate. (the process was release, land, clamp, back off a few >> microns) > > Err, I'm not sure that I understand "land, clamp". I'd inferred that the > great attraction of this approach is that landing is clamping?
Off topic, so I will keep it brief. The requirement is to have a tool travel over the substrate with a few microns fly height. The tool is on a spring suspension and there is an air bearing that allows it to float on this suspension. The tool is lowered until it lands on the specimen (detected by strain gauges on the suspension), then the air is turned off to clamp, and the tool is backed off by the required few microns. -- atp ------------------------------------------------------------------------------ Return on Information: Google Enterprise Search pays you back Get the facts. http://p.sf.net/sfu/google-dev2dev _______________________________________________ Emc-users mailing list [email protected] https://lists.sourceforge.net/lists/listinfo/emc-users
